Laser ablation of high-aspect-ratio hole arrays in tungsten for X-ray applications
Research output: Contribution to journal › Journal article › Research › peer-review
| Original language | English |
|---|---|
| Journal | Microelectronic Engineering |
| Volume | 209 |
| Pages (from-to) | 60-65 |
| ISSN | 0167-9317 |
| DOIs | |
| Publication status | Published - 15 Mar 2019 |
- High aspect ratio gratings, Laser ablation, Medical imaging, Phase-contrast imaging, Tungsten gratings, X-ray optics
Research areas
ID: 234641063